1～6 item / All 6 items
With pressure-type piezo actuators (model names: P-840, P-841)
The P-840 and P-841 series translators are high-resolution linear actuators for static and dynamic applications. They achieve sub-millisecond response times and sub-nanometer resolution.
3000 N pressing force / 700 N pulling force, 90 µm movement with sub-nanometer resolution, µs response.
The P-844/P-845, which features a PICMA® multi-layer stack housed in a preloaded metal case, is a high-load piezo actuator that operates with a maximum stroke of 90 µm at sub-nanometer precision, enabling a maximum pushing force of 3000 N and a pulling force of 700 N. The P-845 type includes a built-in strain gauge sensor (SGS) that directly measures and provides feedback on the piezo movement, minimizing hysteresis and drift. The P-844 is the version without a sensor. *For more details, please download the PDF or contact us.*
Achieving fine positioning with a maximum stroke of 1800µm and nanometer precision.
The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.
High resolution for static and dynamic applications. With preload piezo actuator (HVPZT) sensor option.
The P-216 series is a high-resolution linear piezo actuator (translator) for static and dynamic applications. 【Features】 ○ Stroke up to 180μm ○ Push force up to 4500N ○ Pull force up to 500N ○ Sub-millisecond response ○ Sub-nanometer resolution ○ Options: vacuum, high temperature, and low temperature ● For more details, please contact us or refer to the catalog.
Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.
This is an XYZ-axis nanopositioning stage that performs direct measurement using high-reliability PICMA piezoelectric drive and capacitive sensors. The XY-axis motion range is available in 30 x 30 µm and 100 x 100 µm types, while the Z-axis has a stroke of 10 µm. With an aperture of 50 x 50 mm, it is also ideal for transmitted light applications. It is used in high-precision microscopy, mask/wafer positioning, measurement technology, and more. *For more details, please download the PDF or contact us.*
Sub-nanometer resolution positioning with a 90 µm stroke and 1000 N pressing force, with a microsecond response.
The P-841 is a piezo actuator that incorporates a PICMA® multilayer stack in a preloaded metal case. It operates with a displacement of up to 90 µm at the nanometer level, providing a pushing force of 1000 N and a pulling force of 50 N. A variety of displacement ranges from 15 to 90 µm are available. The ceramic insulation technology of the internal piezo reduces leakage current and moisture intrusion, maintaining performance even during long-term continuous operation. Equipped with a strain gauge position sensor (SGS), it accurately corrects hysteresis and drift. It excels in applications requiring high rigidity and high responsiveness, such as alignment of fibers and optical elements, laser wavelength tuning, and nanotechnology testing fixtures. *For more details, please download the PDF or contact us.*
